Lam 2300 V 2 Kiyo 45 Etcher
Asset # :
81887
Equipment Make:
Lam
Equipment Model:
2300 V 2 Kiyo 45
Type:
Etcher
Wafer Size:
Equipment Configuration:
- Polysilicon
- 4ch
- SiCl4 / BCl3 / HBr / CH4 / CHF3 / Cl2 / CH2F2 / CH3F / NF3 / O2 / CF4 / He / Ar / N2
- Edwards STP XA2703CV
2009 Vintage
- 4ch
- SiCl4 / BCl3 / HBr / CH4 / CHF3 / Cl2 / CH2F2 / CH3F / NF3 / O2 / CF4 / He / Ar / N2
- Edwards STP XA2703CV
2009 Vintage
Equipment Pictures:
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Added: July 26, 2024
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Views: 3