Lam Kiyo 45 Etcher

Asset # : 80593
Equipment Make: Lam
Equipment Model: Kiyo 45
Type: Etcher
Wafer Size:
Equipment Configuration: - 2 Chamber + 1 Strip
- Loadport: Brooks 799-701175-005
- ATM Robot: Brooks P/N 138150
- TM Robot: Brooks P/N 201600-01
- MKS E28B-30200 Process Vacuum Gauge: 0.1 Torr
- MKS 625A-14059 Chamber Vacuum Gauge: 1 Torr
- MKS D24B12TCECB0 Micro Wave Vacuum Gaug
Equipment Pictures:
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  • Added: June 24, 2024

  • Views: 42

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