Lam Rainbow 4420 Poly Etcher
Asset # :
80566
Equipment Make:
Lam
Equipment Model:
Rainbow 4420
Type:
Poly Etcher
Wafer Size:
6"
Equipment Configuration:
- Cassette to Cassette Single Wafer Etcher
- ESC
- Envision
- Particle reduction
- Orbital gas panel
- TCU 2080 Chiller
- ESC
- Envision
- Particle reduction
- Orbital gas panel
- TCU 2080 Chiller
Equipment Pictures:
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Added: June 20, 2024
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Views: 45