Canon MPA 600 FA Mask Aligner
Asset # :
77040
Equipment Make:
Canon
Equipment Model:
MPA 600 FA
Type:
Mask Aligner
Wafer Size:
6"
Equipment Configuration:
- Includes IUC M3 Uniformity and Intensity meter, small parts, and three spare lamps
Focus Data:
- The ICU set up shows uniformity/intensity at 350 mw and measured energy of 30 mJ in log
- Machine sometimes locks up / reset resolves it
- Laser is not work
Focus Data:
- The ICU set up shows uniformity/intensity at 350 mw and measured energy of 30 mJ in log
- Machine sometimes locks up / reset resolves it
- Laser is not work
Equipment Pictures:
Equipment Video:
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Added: March 6, 2024
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Views: 1382