AMEC PD 5 MOCVD
Asset # :
76486
Equipment Make:
AMEC
Equipment Model:
PD 5
Type:
MOCVD
Wafer Size:
Equipment Configuration:
- Wafer Type: 11x4”, 6x6”, 3x8” GaN on Silicon/SiC
- Transfer Module: able to support up to 4 chambers
- Pump: Edwards iXH645H
- Chiller: SMC
- MFCs Type: Horiba
- MO Configuration: TMGa1/2, TMAl1/2, TEGa, Cp2Fe, TMIn, Cp2Mg
- Doping Source: 2x External D
- Transfer Module: able to support up to 4 chambers
- Pump: Edwards iXH645H
- Chiller: SMC
- MFCs Type: Horiba
- MO Configuration: TMGa1/2, TMAl1/2, TEGa, Cp2Fe, TMIn, Cp2Mg
- Doping Source: 2x External D
Equipment Pictures:
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Added: January 31, 2024
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Views: 222