KLA Tencor SP 2 Wafer Inspection System
Asset # :
75706
Equipment Make:
KLA-Tencor
Equipment Model:
SP 2
Type:
Wafer Inspection System
Wafer Size:
12"
Equipment Configuration:
- Vacuum Handling with Triple FIMS
- Windows System: XP SP3
- Main S/W: NGS 5.4 SR2
- 3 x Advan Tag SW CID, Phx, TDK (load port)
- 8 user-configurable LEDs
- Load/unload button for manual delivery
- Cassette/wafer mapping
- Windows System: XP SP3
- Main S/W: NGS 5.4 SR2
- 3 x Advan Tag SW CID, Phx, TDK (load port)
- 8 user-configurable LEDs
- Load/unload button for manual delivery
- Cassette/wafer mapping
Equipment Pictures:
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Added: December 27, 2023
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Views: 98