Evatec / Balzers Bak 1401 MS Physical Vapor Deposition
Asset # :
75560
Equipment Make:
Evatec / Balzers
Equipment Model:
Bak 1401 MS
Type:
PVD
Wafer Size:
Equipment Configuration:
- 42 Amps, 60 Hz, 42 kW
- 8” BAW UBM Metal Evap
Substrate Capacity:
- 2"-330
- 3"-167
- 4"-104
- 6"-47
- 8"-28
- 8” BAW UBM Metal Evap
Substrate Capacity:
- 2"-330
- 3"-167
- 4"-104
- 6"-47
- 8"-28
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Added: December 14, 2023
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Views: 53