Hitachi CG 5000 CD SEM
Asset # :
75415
Equipment Make:
Hitachi
Equipment Model:
CG 5000
Type:
CD-SEM
Wafer Size:
Equipment Configuration:
- Critical Dimension (CD) Measurement Scanning Electron Microscope (SEM)
- Ergonomics Modification
- 3 FOUP
- Resolution: 1.45nm with signal processing function.
- Measurement repeatability: 0.25nm (3sig)
- Throughput: 50wph (20 measurements/wafer), appro
- Ergonomics Modification
- 3 FOUP
- Resolution: 1.45nm with signal processing function.
- Measurement repeatability: 0.25nm (3sig)
- Throughput: 50wph (20 measurements/wafer), appro
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Added: December 5, 2023
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Views: 91