Hitachi CG 5000 CD SEM

Asset # : 75414
Equipment Make: Hitachi
Equipment Model: CG 5000
Type: CD-SEM
Wafer Size:
Equipment Configuration: - Critical Dimension (CD) Measurement Scanning Electron Microscope (SEM)
- Ergonomics Modification
- 3 FOUP
- Resolution: 1.45nm with signal processing function.
- Measurement repeatability: 0.25nm (3sig)
- Throughput: 50wph (20 measurements/wafer), appro
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  • Added: December 5, 2023

  • Views: 160

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