KLA Tencor FLX 5400 Thin Film Measurement System

Asset # : 74303
Equipment Make: KLA-Tencor
Equipment Model: FLX 5400
Type: Thin Film Measurement System
Wafer Size:
Equipment Configuration: - Missing vacuum switch sensor
- V: 115, A: 6.3
- Ph: 1, Hz: 60
Equipment Pictures:

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  • Added: October 1, 2023

  • Views: 190

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