KLA Tencor FLX 5400 Thin Film Measurement System
Asset # :
74303
Equipment Make:
KLA-Tencor
Equipment Model:
FLX 5400
Type:
Thin Film Measurement System
Wafer Size:
Equipment Configuration:
- Missing vacuum switch sensor
- V: 115, A: 6.3
- Ph: 1, Hz: 60
- V: 115, A: 6.3
- Ph: 1, Hz: 60
Equipment Pictures:
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Added: October 1, 2023
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Views: 170