Accent / Nanometrics RPM Sigma Photoluminescence
Asset # :
73885
Equipment Make:
Accent / Nanometrics
Equipment Model:
RPM Sigma
Type:
Photoluminescence
Wafer Size:
Equipment Configuration:
- 980nm laser
- InGaAs and Ex-InGaAs detectors (up to 2.04um cutoff) installed
- Gratings are 150mm/g and 300mm/g
- InGaAs and Ex-InGaAs detectors (up to 2.04um cutoff) installed
- Gratings are 150mm/g and 300mm/g
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Added: September 5, 2023
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Views: 156