KLA Tencor Surfscan SP 2 Wafer Inspection System
Asset # :
73316
Equipment Make:
KLA-Tencor
Equipment Model:
Surfscan SP 2
Type:
Wafer Inspection System
Wafer Size:
Equipment Configuration:
- Software version: NGS 5.4 SR03 HF03
- Power rating: 208V3W-N
- Loading configuration: 3
- Possible damage to chuck area due to a wafer breakage event.
- Power rating: 208V3W-N
- Loading configuration: 3
- Possible damage to chuck area due to a wafer breakage event.
Equipment Pictures:
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Added: August 25, 2023
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Views: 1104