FSI Mercury MP Batch Spray Cleaning System
Asset # :
72130
Equipment Make:
FSI
Equipment Model:
Mercury MP
Type:
Batch Spray Cleaning System
Wafer Size:
4", 6"
Equipment Configuration:
- Canister 1 - H2SO4
- Canister 2 - HCL
- Canister 3 - HF
- Canister 2 - HCL
- Canister 3 - HF
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Added: August 14, 2023
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Views: 75