Novellus Concept Two PVD System
Asset # :
71843
Equipment Make:
Novellus
Equipment Model:
Concept Two
Type:
PVD
Wafer Size:
8"
Equipment Configuration:
- 1 Degas chamber
- 1 Damaclean etch module
- 1 TA PVD Chamber
- 1 CU HCM PVD Chamber
- 1 CU HCM PVD Chamber
- 1 CVD TI SIN Chamber
- 1 Orienter
- 1 Damaclean etch module
- 1 TA PVD Chamber
- 1 CU HCM PVD Chamber
- 1 CU HCM PVD Chamber
- 1 CVD TI SIN Chamber
- 1 Orienter
Equipment Pictures:
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Added: June 12, 2023
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Views: 730