KLA Tencor Surfscan SP 2 Wafer Inspection System
Asset # :
71448
Equipment Make:
KLA-Tencor
Equipment Model:
Surfscan SP 2
Type:
Wafer Inspection System
Wafer Size:
12"
Equipment Configuration:
- Process: BAREINSPSTANDARD Specifications:
- Windows System (XP SP3)
- Main S/W
- NGS 5.4 SR3 HF3
- Wafer: SEMI NotchCarrier:
- 3 AdvanTag SW CID, Phx, Shinko (load port)
- 8 user-configurable LEDs to display the load port status
- Load/unload button f
- Windows System (XP SP3)
- Main S/W
- NGS 5.4 SR3 HF3
- Wafer: SEMI NotchCarrier:
- 3 AdvanTag SW CID, Phx, Shinko (load port)
- 8 user-configurable LEDs to display the load port status
- Load/unload button f
Equipment Pictures:
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Added: May 18, 2023
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Views: 141