Zygo ZeGage 3D Optical Surface Profiler Sold
Asset # :
71120
Equipment Make:
Zygo
Equipment Model:
Zegage
Type:
3D Optical Surface Profiler
Wafer Size:
Equipment Configuration:
With:
- 1-fold SLWD Michelson interferometer (adaptable to nosepiece)
- max. one additional SLDW or LWD lens
- working distance 40.0 mm; NA= 0.03
- Mx control and analysis software, Microsoft Windows 7
- Dell PC, 24" monitor
- 1-fold SLWD Michelson interferometer (adaptable to nosepiece)
- max. one additional SLDW or LWD lens
- working distance 40.0 mm; NA= 0.03
- Mx control and analysis software, Microsoft Windows 7
- Dell PC, 24" monitor
Equipment Pictures:
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Added: May 4, 2023
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Views: 58