KLA Tencor Surfscan 6420 Defect Inspection System Sold
Asset # :
70685
Equipment Make:
KLA-Tencor
Equipment Model:
Surfscan 6420
Type:
Defect Inspection System
Wafer Size:
Equipment Configuration:
- Laser inoperative
- Provides sensitivity down to 0.1 micron on polished silicon
- Provides sensitivity down to 0.1 micron on polished silicon
Equipment Pictures:
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Added: April 17, 2023
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Views: 314