ASM LPCVD

Asset # : 70040
Equipment Make: ASM
Equipment Model:
Type: LPCVD
Wafer Size: 4", 6"
Equipment Configuration: - two tube systems capable of depositing polysilicon, silicon nitride and LTO
- uses dedicated quartz boats
- Tube 1: LPCVD of low temperature oxide
- Tube 2: LPCVD of Silicon Nitride / Polysilicon
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  • Added: March 14, 2023

  • Views: 106

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