Nanometrics Atlas 1000 00493 Metrology System Sold
Asset # :
70010
Equipment Make:
Nanometrics
Equipment Model:
Atlas 1000-00493
Type:
Metrology System
Wafer Size:
8", 12"
Equipment Configuration:
- Robot: Kawasaki Linear Track Type
- Loader: Dual TDK E3 FOUP
- Lamp / Wavelength:
- SR: vis Halogen (400-780 nm)
- SR: UV Deuterium (190-400 nm)
- SE: Xe 210-1000nm (small spot)
- Spot Size:
- SR: 15X/10X:can measure 30x30um / 4x: 5
- Loader: Dual TDK E3 FOUP
- Lamp / Wavelength:
- SR: vis Halogen (400-780 nm)
- SR: UV Deuterium (190-400 nm)
- SE: Xe 210-1000nm (small spot)
- Spot Size:
- SR: 15X/10X:can measure 30x30um / 4x: 5
Equipment Pictures:
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Added: March 13, 2023
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Views: 105