Aviza Technology OMEGA I 2 L ICP Plasma Etch System
Asset # :
68137
Equipment Make:
Aviza
Equipment Model:
OMEGA I 2 L
Type:
ICP Etcher
Wafer Size:
Equipment Configuration:
- BCI3 & CI2 fixed detector
- NH3 fixed detector
- Dry scrubber: 6t 2-slot catalyst barrel that can handle 2 types of gas
- ATH1300M ICP turbo pump upgrade
- 200 PIN ESC TI-200 Micron Assy
Parts:
- AE1513 RF generator (2)
- Betta Tech CU700 chiller
- Adix
- NH3 fixed detector
- Dry scrubber: 6t 2-slot catalyst barrel that can handle 2 types of gas
- ATH1300M ICP turbo pump upgrade
- 200 PIN ESC TI-200 Micron Assy
Parts:
- AE1513 RF generator (2)
- Betta Tech CU700 chiller
- Adix
Equipment Pictures:
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Added: November 28, 2022
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Views: 130