ASML PAS 5500 / 400 D Scanner Sold
Asset # :
68074
Equipment Make:
ASML
Equipment Model:
PAS 5500 / 400 D
Type:
Scanner
Wafer Size:
8"
Equipment Configuration:
- Std TTL + RBA +Ahena + Single and multi Reticule pod
- Non functional: Wafer stage, reticule Stage, WPS, WTS, Rema Blade unit, Off Access alignment , ARMS, Level sensor
- Lens was not affected, kept with N2 Purge, Top and bottom module should be OK
- Non functional: Wafer stage, reticule Stage, WPS, WTS, Rema Blade unit, Off Access alignment , ARMS, Level sensor
- Lens was not affected, kept with N2 Purge, Top and bottom module should be OK
Equipment Pictures:
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Added: November 14, 2022
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Views: 206