Hitachi S 4700 FE SEM
Asset # :
67673
Equipment Make:
Hitachi
Equipment Model:
S 4700
Type:
FE-SEM
Wafer Size:
Equipment Configuration:
Broken parts : Detector used for EDS (EOL detector)
(EDS specification)
- Aztec Live Standard Ultim40
- Detector: Ultim40 (Resolution127eV@MnKα, 40mm2 polymer window)
- Soft package Standard + Option (TruMap/ AutoLock (drift correction))
- Analyzer x4
-
(EDS specification)
- Aztec Live Standard Ultim40
- Detector: Ultim40 (Resolution127eV@MnKα, 40mm2 polymer window)
- Soft package Standard + Option (TruMap/ AutoLock (drift correction))
- Analyzer x4
-
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Added: October 14, 2022
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Views: 207