Hitachi S 9360 CD SEM
Asset # :
67216
Equipment Make:
Hitachi
Equipment Model:
S 9360
Type:
CD-SEM
Wafer Size:
Equipment Configuration:
- Lower Vacuum System working properly
- Main Laser Source and 5-Phase drivers are dead
- The main software startup monitor stops and could not complete the reboot
- Both AV-1 valve and the objective aperture assemblies are broken, but still not leaking
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- Main Laser Source and 5-Phase drivers are dead
- The main software startup monitor stops and could not complete the reboot
- Both AV-1 valve and the objective aperture assemblies are broken, but still not leaking
-
Equipment Pictures:
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Added: September 7, 2022
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Views: 434