Dainippon (DNS) WS – 820 L Wafer Scrubber
Asset # :
66097
Equipment Make:
Dainippon (DNS)
Equipment Model:
WS 820 L
Type:
Wafer Scrubber
Wafer Size:
8"
Equipment Configuration:
- Automated Alpha Tool (Double Sided Porous Silicon: 25 wafer batch)
- Wafer Flow Left to right
- Cassette included
Components to include:
- Main body
- Loader / Unloader
- Two robots for bath to bath transfer systems – one robot for wet wafers and one f
- Wafer Flow Left to right
- Cassette included
Components to include:
- Main body
- Loader / Unloader
- Two robots for bath to bath transfer systems – one robot for wet wafers and one f
Equipment Pictures:
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Added: June 29, 2022
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Views: 286