Tel P 12 XLm Prober Sold

Loader:
– Arm Assy
– Z motor
– Theta motor
– Search sensor cylinder
– No: controller assy, interface board, prealign sensor
Main:
– Power supply
– Monitor
Stage:
– Hot chuck
– X-motor, Y-motor
– X-DRV, Y-DRV, Z-DRV
– SACC
– Hot chuck controller
– Board st