EVG 620 TB Mask Aligner

Asset # : 65685

Equipment Make: EVG

Equipment Model: 620 TB

Type: Mask Aligner

Wafer Size:

Equipment Configuration:

– Topside Alignment (TSA)
– Manual Handling
– Manual Controlled Stage
– Wafer Size: 6″/150mm
– Objectives: 10x
– Tooling Tray
– Uniformity Test Plate
– Lamphouse: 1000W Lamphouse
– Exposure Optics: Type C, 350nm – 450nm, Broadband
– Microsoft Windows ba

Equipment Pictures: