Applied Materials Producer GT Pre Clean Siconi Chamber
Asset # :
65635
Equipment Make:
Applied Materials
Equipment Model:
Producer GT
Type:
Pre-Clean Siconi Chamber
Wafer Size:
12"
Equipment Configuration:
– Process: SiCoNi
– RPS: FI20620-1 (2)
– RF generator: APRX3013 AE
Missing Parts:
– RF generator with cover
– Lift pins
Equipment Pictures:
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Added: May 24, 2022
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Views: 1295