Novellus Concept Two PVD System Sold
Asset # :
65020
Equipment Make:
Novellus
Equipment Model:
Concept Two
Type:
PVD
Wafer Size:
6"
Equipment Configuration:
- Cassette Load Lock Modules
- With 3 cassettes, a Motion Engineering Inc (MEI) 3 axis single arms robot
- Leybold TMP/NT 150/360V/H turbo pump
- Desorb Modules For wafer orientation and lamps heating
- Leybold TMP/NT 150/360V/H turbo pump
- Transport M
- With 3 cassettes, a Motion Engineering Inc (MEI) 3 axis single arms robot
- Leybold TMP/NT 150/360V/H turbo pump
- Desorb Modules For wafer orientation and lamps heating
- Leybold TMP/NT 150/360V/H turbo pump
- Transport M
Equipment Pictures:
Send BTG Message:
InquireAd Details
-
Added: April 21, 2022
-
Views: 195