Ebara F REX 300 S CMP Polisher
Asset # :
64853
Equipment Make:
Ebara
Equipment Model:
FREX 300 S
Type:
Chemical Mechanical Polishing (CMP) System
Wafer Size:
12"
Equipment Configuration:
– 2 polish tracks, 2 platen
– 3x roll roll cleaner
– 4x G3 AI head
– Eddy current endpoint on pol A + C
– Spin rinse dryer
Equipment Pictures:
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Added: April 6, 2022
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Views: 620