Ebara F REX 300 S CMP Polisher

Asset # : 64853
Equipment Make: Ebara
Equipment Model: FREX 300 S
Type: Chemical Mechanical Polishing (CMP) System
Wafer Size: 12"
Equipment Configuration:

– 2 polish tracks, 2 platen
– 3x roll roll cleaner
– 4x G3 AI head
– Eddy current endpoint on pol A + C
– Spin rinse dryer

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  • Added: April 6, 2022

  • Views: 683

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