Varian E 500 EHPI Medium Current Implanter
Asset # :
64852
Equipment Make:
Varian
Equipment Model:
E 500 EHPI
Type:
Medium Current Implanter
Wafer Size:
8"
Equipment Configuration:
– Top connection
– Extraction electrode: EHP
– Bushing: EHP
– Extraction PS
– Source magnet polarity switch
Gasbox:
– String 1: HP
– String 2: HP
– String 3: SDS
– String 4: SDS
Beamline:
– Two step reducer
– Gauss meter
– Terminal pneumatics
– Auto decel
Equipment Pictures:
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Added: April 6, 2022
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Views: 448