Leybold APS 1104 Optical Coating Machine
Asset # :
64804
Equipment Make:
Leybold
Equipment Model:
APS 1104
Type:
Optical Coating Machine
Wafer Size:
Equipment Configuration:
- Substrate Dome Size: 1100-1200MM
- Ion Source: APS Plasma Source
- Control System: K1 Main control unit,K2 Control unit
- Film Thickness Monitor: 6" Quartz crystal film thickness monitor
- EB Guns: (2) EB-Gun ESV14 / EB-Gun HVTen
- Substrate Heating
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- Ion Source: APS Plasma Source
- Control System: K1 Main control unit,K2 Control unit
- Film Thickness Monitor: 6" Quartz crystal film thickness monitor
- EB Guns: (2) EB-Gun ESV14 / EB-Gun HVTen
- Substrate Heating
-
Equipment Pictures:
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Added: April 1, 2022
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Views: 630