KLA Tencor 5300 Overlay Measurement System
Asset # :
64443
Equipment Make:
KLA-Tencor
Equipment Model:
5300
Type:
Overlay Measurement System
Wafer Size:
Equipment Configuration:
Missing:
– Computer – HDD
– Motion controller
– Pre aligner
– Robot controller
– Finger
– Mapper
– Load Port #1,2
– SBC controller
– AMS
– Pneumatic panel (air/vacuum)
– Sutter
– Z PZT
– PDA
– Interface board
– Flotation controller
– Lamp housing
– PM tar
Equipment Pictures:
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Added: March 24, 2022
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Views: 250