Novellus Concept 3 Speed MAX Lite HDP CVD
Asset # :
62495
Equipment Make:
Novellus
Equipment Model:
Concept Three Speed Max Lite
Type:
HDP-CVD
Wafer Size:
12"
Equipment Configuration:
– Missing Hard Drive
– Process: STI Oxide Dep2
– Software version: 5.73B39
– Power rating: 208 AC 3-phase
– Loading config: 3 load port
– Chm/Unit Position 1: CHA N2, AR, O2, He, SiH4, H2, NF3
– Chm/Unit Position 2: CHB N2, AR, O2, He, SiH4, H2, NF3
– Chm
Equipment Pictures:
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Added: December 20, 2021
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Views: 288