Tel Unity 2 E–Sold
Asset # :
62471
Equipment Make:
Tel
Equipment Model:
Unity 2 E
Type:
Wafer Size:
8"
Equipment Configuration:
– 2 chamber silicon etch platform
– Software vs. 3.60rev206
– CIM: SECS
– Factory interface: open cassette
Hardware:
– Tool RF rack
– Scrubber: mystaire MTS-30C
– T/C and C/C pump – Ebara AIOS
– Chamber pump: Edwards iH80
– Chiller – SMC INR-499-213-X020
Equipment Pictures:
Send BTG Message:
InquireAd Details
-
Added: December 15, 2021
-
Views: 647