Lam Rainbow 4520 i Oxide Etch Tool Sold
Asset # :
62135
Equipment Make:
Lam
Equipment Model:
Rainbow 4520 i
Type:
Oxide Etch Tool
Wafer Size:
6", 8"
Equipment Configuration:
– ESC System
– with Isotropic Etch Chamber
– Software Revision Level: E-1.5.2
– Monochromatic Endpoint
– Cassette to Cassette
– Chiller: Lam TCU 2080
– Accessories: Mainframe, Chiller, TCU, RF Cart
– Upgrade to VAT Throttle Valve
Equipment Pictures:
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Added: November 11, 2021
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Views: 537