EVG EV 640 R Topside / Backside Mask Aligner
Asset # :
61932
Equipment Make:
EVG
Equipment Model:
EV 640 R
Type:
Topside / Backside Mask Aligner
Wafer Size:
4", 6"
Equipment Configuration:
– Topside alignment
– Backside camera-based alignment
– Software-based auto-alignment
– Wafer flat alignment, large gap alignment
– 350W UV constant-energy or constant-power exposure
Equipment Pictures:
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Added: October 28, 2021
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Views: 87