KLA Tencor StarLight Terastar SLF 437 8 HR–
Asset # :
61321
Equipment Make:
KLA-Tencor
Equipment Model:
Starlight Terastar SLF 437-8 HR
Type:
Wafer Size:
Equipment Configuration:
Robot controller:
– Backup battery and one 4-phase motor driver board
– Needs robot calibration
– Qty. 3 Skyboard
– Loader: Brooks ISE R 125/150
Equipment Pictures:
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Added: September 22, 2021
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Views: 1163