Axcelis / Eaton NV 8200 P–Sold
Asset # :
60940
Equipment Make:
Axcelis / Eaton Nova
Equipment Model:
NV 8200 P
Type:
Wafer Size:
8"
Equipment Configuration:
– Dose2, Block3
– Energy Config: 0 – 250Kv Midcurrent
– CE-Conformity: Yes
– Cryo-Pumps: 3x CTI Onboard 8
– Cryo-Kompressor: CTI 9650 Low-Voltage
– Turbo-Pumps: Leybold: LH600C + LH1000C + LH151C
– Rough-Pumps: Edwards: ODP40 + QDP40 + IQDP80/QMB250
– Cla
Equipment Pictures:
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Added: August 13, 2021
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Views: 191