Aixtron R 6 Close Coupled Showerhead MOCVD Sold
Asset # :
57964
Equipment Make:
Aixtron
Equipment Model:
R 6
Type:
Close Coupled Showerhead MOCVD System
Wafer Size:
Equipment Configuration:
– GaN
– Loader/transfer Module
– Edwards nXDS15i vacuum pump
– Process module
– Edwards nXDS10i vacuum pump
– Gast Vacuum pump (x2)
– SMC HRS030-WN-20-T Chiller
– SMC Thermo-Con INR-244-781 Thermoelectric bath (x2)
– Thyrobox HPDU high power distribution
Equipment Pictures:
Send BTG Message:
InquireAd Details
-
Added: December 7, 2020
-
Views: 577