Aixtron AIX 2800 G 4 HT GaN MOCVD Sold
Asset # :
57947
Equipment Make:
Aixtron
Equipment Model:
AIX 2800 G 4 HT
Type:
GaN MOCVD
Wafer Size:
4"
Equipment Configuration:
– Capacity: 6″×6 or 4″×11 or 2″×24
– Susceptor dimension: D520mm×T19mm
– Chamber coil (9 channels)
– Hydride Line : 1xNH3, 2xDopant
– Purifier: H2, N2, NH3
– Pump : DOR pump(SH-110), Ebara pump(ESA70)
-H2 Purifier (IN LINE Type)
– Maker TERATECH
– Model T
Equipment Pictures:
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Added: December 3, 2020
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Views: 581