Therma wave TP 500 Ion Implanter Sold
Asset # :
57730
Equipment Make:
Therma-wave
Equipment Model:
TP 500
Type:
Ion Implanter
Wafer Size:
8"
Equipment Configuration:
– Laser Assy Pump not working
Computer:
– Main CPU: 486DX
– Memory: 16MB Ram
– HDD Drive
– 3.5 FDD Drive
– Color Monitor / Keyboard / Printer
Wafer Handling:
– Robot: 3-Axis
– Cassette Stage: 2
IMS Dose Range:
– B: 1E11~2E16
– P: 1E11~3E14
– AS: 1E11~1E1
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Added: November 13, 2020
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Views: 388