Hitachi S 7800 H CD SEM Sold
Asset # :
57728
Equipment Make:
Hitachi
Equipment Model:
S 7800 H
Type:
CD-SEM
Wafer Size:
Equipment Configuration:
– Leak on AV-2 (Valve between loading chamber and specimen chamber)
– Not possible to establish steady vacuum.
– Turbo pump #2 overheating (the TP itself should be fine)
Equipment Pictures:
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Added: November 10, 2020
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Views: 299