Varian VIISion 80 + HS 31 ION Implantation System Sold
Asset # :
57523
Equipment Make:
Varian
Equipment Model:
Viision 80 + HS 31
Type:
Ion Implant System
Wafer Size:
8"
Equipment Configuration:
– Cassette to Cassette
– Varian Membran Pump
– Source Trubo: Pfeiffer
– Beamline Turbo: Pfeiffer
– Endstation Manifold Turbo Pump: Pfeiffer
– Endstation Differential Pump: Varian Membran Pump
– Cryo Compressor (x2): CTI 9600
– Cryo Prump (x4): CTI 250 F
Send BTG Message:
InquireAd Details
-
Added: October 20, 2020
-
Views: 1194