Ulvac Ei 5 K Batch Type High Vacuum Evaporation System for ITO Sold

Equipment ran 4″ Sapphire wafers
2″ – 6″ Capable
Main system: (Including Power supply)
Used amount or use pressure: 3Ø200V±10% 50kVA
Connection: M8 terminal
Type: Cooling Water
Main system: Main system
Used amount or use pressure: 0.2~0.3MPa 8(L/min) o