Novellus Systems Inova PVD Sputter
Asset # :
55665
Equipment Make:
Novellus
Equipment Model:
Inova
Type:
PVD Sputter
Wafer Size:
8"
Equipment Configuration:
– SMIF system to remain with fab. LPT 2000. Will not be sold with tool.
– Ta Barrier / Cu Seed Deposition
– Main system: Inova mainframe (transfer, load, Aligner, cool, degas chm & loadlock)
– Handler System: 3-axis Trust Cntrl ConMag II Robot Assy with
Equipment Pictures:
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Added: October 9, 2020
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Views: 563