Lam TCP 9600 CFE Metal Etcher
Asset # :
53904
Equipment Make:
Lam
Equipment Model:
TCP 9600 CFE
Type:
Metal Etcher
Wafer Size:
6"
Equipment Configuration:
– Software version: E1.5E2
– CE mark certified
– SECS interface
– 208 V, 3 phase
– Gas panel type: Standard / CES
– Standalone etcher mainframe type
– Microwave strip, DSQ, PLL
– Signal lamp power
– Remote operator interface
– Helium cooling MFC type: Adv
Equipment Pictures:
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Added: October 9, 2020
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Views: 1555