Hitachi S 8840 Critical Dimension Scanning Electron Microscope (CD SEM) Sold
Asset # :
53900
Equipment Make:
Hitachi
Equipment Model:
S 8840
Type:
CD-SEM
Wafer Size:
6"
Equipment Configuration:
– Robot make/model: MECS UTC 100 A
– Software version: 15.10
– HP computer: B 180 L
– CE mark certified
– 208 V
– LoadLock Turbo: Leybold Turbovac 50
– LoadLock Turbo controller: Leybold Turbotronik NT 10
– Process Chamber Turbo: Leybold Turbovac 340 M
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Equipment Pictures:
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Added: October 9, 2020
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Views: 1620