KLA Tencor Surfscan SP 1 TBi Wafer Inspection System Sold

Asset # : 50296

Equipment Make: KLA-Tencor

Equipment Model: Surfscan SP 1 TBI

Type: Wafer Inspection System

Wafer Size:

Equipment Configuration:

– Automation-Open Cassette
– Notch Align
– 1 Port (8″/12″)
– 208-240Volts
– 1 Phase
– 50/60Hz
– 30A
– Software version: MX Version 4.00.5254 & DIC, Oblique, XY Coordinates
– Chuck Handler
– 200/300 mm Wafer Sizes
– Single Wafer End Effector Robotic Handl

Equipment Pictures: