Denton Explorer 14 DC Sputtering System

Asset # : 47608

Equipment Make: Denton

Equipment Model: Explorer 14

Type: DC Sputterer

Wafer Size:

Equipment Configuration:

– 12″ dia. x 18″ H
– Pumping System: Turbomolecular pump
– Alcatel 2010 two stage, rotary vane pump
– Sputter Source: (1) DSM-300A cold sputter module
– 300W DC power supply
– 4″ dia. magnetron sputter source
– Substrate Fixturing: 8.0″ Omni rotating fixt

Equipment Pictures: