Veeco 210 IBD
Asset # :
42811
Equipment Make:
Veeco
Equipment Model:
210
Type:
Ion Beam Deposition (IBD)
Wafer Size:
Equipment Configuration:
– 1 Process Chamber & 1 Transfer Chamber
– Used for Etching and Metallization, Targets: 1 AL203, 1 Si and 1TaO
– Win 3.1 Software
– Chamber Turbo Pump – Leybold MAG W200 CT
– Loadlock Pump – TMH 260 P
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Added: December 17, 2018
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Views: 114